Elizabeth K. Reilly, Ph.D.

Dr. Reilly's areas of expertise encompass semiconductor process technology including microelectromechanical systems (MEMS), nanoelectromechanical systems, and Li-ion batteries. She also has significant experience in composite ceramics, piezoelectrics, and ferroelectrics, in addition to extensive knowledge of mechanical behavior of materials, composites, and manufacturing techniques. Her practical skills include finite element modeling (FEM), interferometry, electrical characterization, and dynamic characterization of resonant microdevices.

Dr. Reilly’s past research at The University of California, Berkeley focused on the development of a microscale energy scavenging devices involving the growth and characterization of epitaxial PZT directly on silicon substrates using pulsed laser deposition (PLD). The work leveraged expertise in design and fabrication of microscale devices. Past research at Physical Sciences Inc. involved lithium battery technologies in both primary and secondary cells, specifically the development of 3D carbon anodes via electrospinning and investigation of novel polymer separator materials to prevent over charging.

Reilly E, Wright P. Modeling, fabrication, and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device. J Micromech Microeng 2009; 19(9):095014.

Mitchenson P, Reilly E, Toh T, Wright P, Yeatman E. Performance limits of the three MEMS inertial energy generator transduction types. J Micromech Microeng 2007; 17:S211–S216.

Zavaliche F, Zheng H, Mohaddes-Ardabili L, Yang SY, Zhan Q, Shafer P, Reilly E, Chopdekar R, Jia Y, Wright P, Schlom DG, Suzuki Y, Ramesh R. Electric field-induced magnetization switching in epitaxial columnar nanostructures. Nano Letters 2005; 5:1793.

Roundy S, Leland ES, Baker J, Carleton E, Reilly E, Lai E, Otis B, Rabaey JM, Wright PK, Sundararajan V. Vibration-based energy scavenging for pervasive computing: New designs and materials that increase power output. IEEE Pervasive Computing 2005; 2(1):28–35.

Presentations

Reilly E, Miller R, Fain R, Wright P. A study of ambient vibrations for piezoelectric energy scavenging. International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (POWERMEMS), Washington DC, 2009.

Ho C, Mark M, Koplow M, Miller L, Chen A, Reilly E, Rabaey J, Evans J, Wright P. Technologies for an autonomous wireless home healthcare system. International Workshop on Wearable and Implantable Body Sensor Networks, Berkeley, CA, pp. 38–41, 2009.

Newman A, Lang CM, Pawle R, Dokhan A, Reilly EK, Lennhoff JD. Structural lithium ion battery. 43rd Power Sources Conference, Philadelphia, PA, 2008.

Reilly E, Wright P. Integration of thin film piezoelectrics on Si for application in vibrational energy scavenging. International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (POWERMEMS), Freiburg, Germany, pp. 73–76, 2007.

Reilly E, Miller L, Wright P. Optimization of on-chip piezoelectric energy scavenging for integration of medical sensors with low-power wireless networks. International Workshop on Wearable and Implantable Body Sensor Networks, Aachen, Germany, 2007.

Reilly E, Wright P. Thin film piezoelectric energy scavenging systems for an on-chip power supply. International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Berkeley, CA, pp. 161–165, 2006.

Reilly E, Carleton E, Wright P. Thin film piezoelectric energy scavenging system for long term medical monitoring. International Workshop on Wearable and Implantable Body Sensor Networks, Cambridge, MA, pp. 38–41, 2006.

• Post Doctoral Researcher, Berkeley Manufacturing Institute and Berkeley Wireless Research Center, University of California, Berkeley, 2008–2010
• Principal Scientist, Physical Sciences Inc., 2007–2008

• Institute of Electronics and Electrical Engineers—IEEE
• Society of Women Engineers—SWE