PROJECT PROFILE - The Design Development Process
MEMS development involves several stages to integrate the
essential elements of mechanical and electrical design, fabrication,
and packaging.
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1.
concept – Translate functional specifications
into a MEMS-compatible product concept.
2.
design – Use advanced modeling (FEM, analytical
solutions) to convert concept to physical design. Include
fabrication, electrical, and packaging requirements at
the design stage.
3.
layout – Use advanced layout software for design
of mask sets that specify the manufacturing process. This
can be done with MEMS foundries to exploit the specific
capabilities of each manufacturing facility.
4.
system integration – Incorporate electrical systems
for actuation and sensing of the mechanical system. Integrate
the electrical requirements early in the development process.
5.
device fabrication – Work with MEMS fabricators
to select appropriate production processes and suppliers
of fabricated devices.
6.
packaging – Select, prototype, and test packaged
devices for final production.