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Robert F. Allen

Senior Associate

Technology Development

(623) 582-6949 tel
(623) 581-8814 fax

Phoenix

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Professional Profile


Mr. Allen has over 28 years experience in modular and embedded systems electronics, software, mechanical and optical components, and system design down to the component level. He has over 6 years of direct military experience and continuous experience, in excess of 30 years as a systems designer and architect for automation and test systems and embedded solutions. His major fields include Aerospace, Defense, Automated Manufacturing, Semiconductor, Medical, Optical Special Effects and Industrial Cameras, Agriculture, Robotics, Machine Vision, and Basic Research. Mr. Allen has been awarded 16 patents in Semiconductor, CMP equipment design and vehicle tracking.

  • B.S., Electrical Engineering, Arizona State University, 1980
  • Phi Theta Kappa National Honor Fraternity, Omega Upsilon chapter

    • Open Water Diver PADI #0102C65211
    • Advanced Open Water Diver SDI #48005

    • U.S. Patent 6,892,131: Vehicle tracking, communication and fleet management system, issued May 10, 2005 ((J. Coffee, R. Allen, et al.).
    • U.S. Patent 6,611,755: Vehicle tracking, communication and fleet management system, issued August 26, 2003 (J. Coffee, R. Allen, et al.).
    • U.S. Patent 6,364,745: Mapping system for semiconductor wafer cassettes, issued April 2, 2002 (J.R. Gonzalez-Martin, C. Karlsrud, R. Allen, T. Jordan, C. Howard, A. Hamer, J Cunnane, P. Gopalan, B. Thornton, J. Macernie, F. Calderon).
    • U.S. Patent 6,356,091: Automatic wafer mapping in a wet environment on a wafer cleaner, issued March 12, 2002 (J. Nimtz, T. Jordan, R. Allen).
    • U.S. Patent 6,350,177: Combined CMP and Wafer Cleaning Apparatus and Associated Methods, issued February 26, 2002 (J. Gonzalez, C. Karlsrud, R. Allen, T. Jordan, C. Howard, A. Hamer, J. Cunnane, P. Gopalan, B. Thornton, J. Macernie, F. Calderon).
    • U.S. Patent 6,296,546: Index Table and Drive Mechanism for a Chemical Mechanical Planarization Machine, October 2, 2001 (R. Allen, T. Jordan).
    • U.S. Patent 6,292,708: Distributed Control System for aWafer Processing Machine (Auriga), issued September 18, 2001 (R. Allen, T. Jordan).
    • U.S. Patent 6,213,853: Integral Machine for Polishing, Cleaning, Rinsing and Drying Workpieces, issued April 10, 2001 (J.R Gonzalez-Martin, C. Karlsrud, R. Allen, T. Jordan, C. Howard, A. Hamer, J. Cunnane, P. Gopalan, B. Thornton, J. Macernie, F. Calderon).
    • U.S. Patent 6,190,118: Tilt Mechanism for Wafer Cassette, issued February 20, 2001 (R. Allen, R.T. Jordan).
    • U.S. Patent 6,033,521: Tilt Mechanism for Wafer Cassette, issued March 7, 2000 (R. Allen, R.T. Jordan).
    • U.S. Patent 5,975,986: Index Table and Drive Mechanism for a CMP Machine, issued November 2, 1999 (R. Allen, T. Jordan).
    • U.S. Patent 5,961,369: M & A for the In Process Detection of Workpieces with Monochromatic Light Source, issued October 5, 1999 (A. Bartels, R. Allen, P. Holzapfel, W. Lin).
    • U.S. Patent 5,933,289: M & A For the in Process Detection of Workpieces in a CMP Environment, issued November 30, 1999 (R. Allen. P. Holzaphel, A. Bartels, W. Lin).
    • U.S. Patent 5,834,645: M & A For In-Process Detection of Workpieces with a Contact Probe, issued November 10, 1998 (A. Bartels, R. Allen, C. Karlsrud, J. Mosca).
    • U.S. Patent 5,823,853: M & A for the In Process Detection of Workpieces with Monochromatic Light Source, issued October 20, 1998 (A. Bartels, R. Allen, C. Karlsrud, J Mosca).
    • U.S. Patent 5,733,171: M & A for the in Process Detection of Workpieces in a CMP Environment, issued March 31, 1998 (B. Allen, P. Holzapfel, A. Bartels, w. Lin).