Amy Marquardt
Amy E. Marquardt, Ph.D.
Senior Associate
Materials & Corrosion Engineering
Menlo Park

Dr. Marquardt has seven years of experience in materials characterization relating to the production, fabrication, and characterization of thin films. Her expertise is in thin film analysis of atomic layer deposited and etched metal oxides for applications in anti-corrosion coatings, semiconductor processing, and advanced optics coatings.

During her graduate work at the University of Maryland, College Park, she produced metal oxide thin films with atomic layer deposition (ALD) and optimized conformality and optical properties for use as anti-corrosion coatings on metals. She is skilled in thin film and metal corrosion characterization through x-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy/energy dispersive x-ray spectroscopy, spectroscopic ellipsometry, Raman spectroscopy, focused ion beam, and secondary ion mass spectroscopy. Her contributions in developing ALD for non-ideal surfaces were recognized by the Distinguished Dissertation Award at the University of Maryland Department of Materials Science and Engineering. 

In her capacity as a postdoctoral researcher at the University of Colorado, Boulder, she investigated the mechanisms behind thermal atomic layer etching of SiO2. She also optimized the conformality of thermal atomic layer etching in high aspect ratio structures for semiconductor processing applications. As a postdoctoral researcher at Northwestern University, Dr. Marquardt applied atom probe tomography to develop a kinetics model for copper nanoparticle doped silicate glasses. 

CREDENTIALS & PROFESSIONAL HONORS

  • Ph.D., Materials Science and Engineering, University of Maryland, College Park, 2015
  • B.S., Physics, Coe College, 2009
  • Committee on Institutional Cooperation – Smithsonian Research Fellowship, 2014-2015

    Distinguished Dissertation Award, Department of Materials Science and Engineering, University of Maryland, College Park, 2016

Publications

Dumont JW, Marquardt AE, George SM. Thermal atomic layer etching of SiO2 by a “Conversion-Etch” Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride. ACS Applied Materials and Interfaces 2017; 9:10296-10307.

McCoy TJ, Marquardt AE, Wasson JT, Ash RD, Vicenzi EP. The Anoka, Minnesota Iron Meteorite as Parent to Hopewell Meteoritic Metal Beads from Havana, Illinois. Journal of Archaeological Science 2017; 13-22.

Marquardt AE, Breitung E, Weisser T, Gates G, Phaneuf R. Protecting silver cultural heritage objects with atomic layer deposited corrosion barriers. Heritage Science 2015; 3:38.

Lettieri M, Licciulli A, Marquardt AE, Freedman W, Phaneuf R, Calia A. Nanostructured TiO2 for stone coating: assessing compatibility with basic stone’s properties and photocatalytic effectiveness. Bulletin of Engineering Geology and the Environment 2015; 1-14.

Marquardt AE, Breitung E, Weisser T, Gates G. Rubloff G, Phaneuf R. Characterization of atomic layer deposited films as diffusion barriers for art objects. Electrochemical Society Transactions 2013; 58:277-286.

Breitung E, Marquardt AE, Gates G, Weisser T, Ash R, Henn-Lecordier L, Rubloff G, Phaneuf R. Atomic layer deposition films as protective coatings for silver. American Institute of Conservation, Research and Technical Studies Proceedings, 2010; 3:279.

Marquardt AE, Roberts M, Feller S, Singleton S, Affatigato M. Structural effects of europium on lead borate glasses. Physics and Chemistry of Glasses-European Journal of Glass Science and Technology Part B 2010; 51:59-64.

Affatigato M, Feller S, Kramer R, Marquardt AE, Mertel K, Blair S, Stentz D, Crist D. Studies of borate glass structure using laser ionization time of flight mass spectrometry. Physics and Chemistry of Glasses-European Journal of Glass Science and Technology Part B 2009; 50:335-342.

Presentations

Marquardt A, Sun H, George S, Conformality of thermal Al2O3 atomic layer etching in high aspect ratio structures. American Vacuum Society 63rd International Symposium and Exhibition, Nashville, Tennessee, 2016.

Marquardt A, Grissom C, Vicenzi E, Phaneuf R, Atomic layer deposited thin films for protecting bronze patinas, 8th Annual Smithsonian Institute Conservation Conference, Suitland, Maryland, 2015.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Atomic layer deposited diffusion barriers on non-ideal silver and bronze cultural heritage objects, American Vacuum Society 61th International Symposium and Exhibition, Baltimore, Maryland, 2014. 

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Atomic layer deposited films as diffusion barriers for silver cultural heritage objects, Materials Science and Technology 2014 Meeting, Pittsburgh, Pennsylvania, 2014.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Investigation of Atomic Layer Deposited Metal Oxide Layers for Conservation of Metal Cultural Heritage Objects, Microscopy and Microanalysis 2014, Hartford, Connecticut, 2014. 

Marquardt A, Phaneuf R, Guibertoni D, Pepponi G, Bersani M, Protecting Art with Nanotechnology: SIMS characterization of atomic layer deposited thin films to preserve cultural heritage objects, University of Trento, Trento, Italy, 2014.

Marquardt A, Phaneuf R, Guibertoni D, Pepponi G, Bersani M, Protecting Art with Nanotechnology: Atomic layer deposited thin films to preserve cultural heritage objects, Fondazione Bruno Kessler, Povo, Italy, 2013. 

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, A New Barrier Coating to Reduce Tarnish on Silver Art, American Conservation Institute 41th Annual Meeting, Indianapolis, Indiana, 2013.

Breitung E, Marquardt A, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Atomic Layer deposition films as protective coatings for silver, American Conservation Institute 40th Annual Meeting, Albuquerque, New Mexico, 2012.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Advances in Atomic Layer Deposited Coatings for the Corrosion Prevention of Silver Artifacts, PITTCON Conference and Expo 2013, Philadelphia, Pennsylvania, 2013.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Effective Lifetimes and Reversibility of Atomic Layer Deposited Diffusion Barrier Films for Silver Artifacts, American Physical Society March 2013 Meeting. Baltimore, Maryland, 2013.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Atomic Layer Deposition Films for Barriers for Silver Artifacts: An Interface between Science and Art (SCIART) Project, American Vacuum Society 59th International Symposium and Exhibition, Tampa, Florida, 2012.

Breitung E, Marquardt A, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ, Multi-Layer Atomic Layer Deposition Films as Protective Coatings for Silver Art, Gordon Research Conference Scientific Methods in Cultural Heritage Research, West Dover, Vermont, 2012.

Marquardt A, Breitung E, Gates G, Drayman-Weisser T, Rubloff GW, Phaneuf RJ ,Atomic Layer Deposition Films as Diffusion Barriers for Silver Artifacts, American Physical Society March 2012 Meeting, Boston, Massachusetts, 2012.

Phaneuf RJ , Marquardt A, Breitung E, Le Cordier L, Gates G, Drayman-Weisser T, Rubloff GW, SCIART: Protection of Silver Objects from Corrosion using Atomic Layer Deposited Barrier Coatings, American Chemical Society National Meeting, Anaheim, California, 2011. 

Marquardt A, Roberts M, Singleton S, Feller S, Affatigato M, Structural Effects of Europium on Lead Borate Glass. 6th International Conference on Borate Glasses, Crystals and Melts, Himeji, Japan, 2008. 

Marquardt A, Vicenzi E, McCoy T, The Source of Hopewell Extraterrestrial Metal and its Anthropological Implications. Society for American Archaeology, Vancouver, Canada, 2008. 

Patents

US Patent Application Number 14/839664: Protective Coatings for Cultural Heritage Objects (Marquardt AE, Breitung E, Weisser T, Gates G, Phaneuf R).

World Intellectual Property Organization Patent Number 2017/213842: Enhancement of Thermal Atomic Layer Etching (George SM, Johnson NR, DuMont JW, Marquardt AE, Lee Y, Zywotko DR).

Prior Experience

Postdoctoral Fellow, Northwestern University, 2016-2017

Postdoctoral Fellow, University of Colorado Boulder, 2015-2016

CREDENTIALS & PROFESSIONAL HONORS

  • Ph.D., Materials Science and Engineering, University of Maryland, College Park, 2015
  • B.S., Physics, Coe College, 2009
  • Committee on Institutional Cooperation – Smithsonian Research Fellowship, 2014-2015

    Distinguished Dissertation Award, Department of Materials Science and Engineering, University of Maryland, College Park, 2016